{"id":2301,"date":"2026-06-18T05:54:25","date_gmt":"2026-06-18T05:54:25","guid":{"rendered":"https:\/\/www.inforstack.com\/?p=2301"},"modified":"2026-06-18T05:54:26","modified_gmt":"2026-06-18T05:54:26","slug":"oist%ef%bc%8ceuv-%e5%85%89%e5%88%bb%ef%bc%8cshintake%ef%bc%8c%e7%ae%80%e5%8c%96%e5%85%89%e5%ad%a6%e8%b7%af%e5%be%84%ef%bc%8c%e5%8d%8a%e5%af%bc%e4%bd%93%e8%83%bd%e6%95%88%ef%bc%8c%e5%9f%83%e7%b1%b3","status":"publish","type":"post","link":"https:\/\/www.inforstack.com\/?p=2301","title":{"rendered":"\u3010\u6280\u672f\u524d\u6cbf\u3011\u51b2\u523a angstrom \u65f6\u4ee3\uff1a\u51b2\u7ef3\u79d1\u5b66\u6280\u672f\u5927\u5b66\u9662\u5927\u5b66\uff08OIST\uff09\u63d0\u51fa\u65b0\u578b\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u523b\u7cfb\u7edf\uff0c\u529f\u8017\u964d\u81f3\u4f20\u7edf\u7cfb\u7edf\u5341\u5206\u4e4b\u4e00"},"content":{"rendered":"\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"288\" src=\"https:\/\/www.inforstack.com\/wp-content\/uploads\/2026\/06\/\u56fe\u7247-14-1024x288.png\" alt=\"\" class=\"wp-image-2302\" srcset=\"https:\/\/www.inforstack.com\/wp-content\/uploads\/2026\/06\/\u56fe\u7247-14-1024x288.png 1024w, https:\/\/www.inforstack.com\/wp-content\/uploads\/2026\/06\/\u56fe\u7247-14-300x84.png 300w, https:\/\/www.inforstack.com\/wp-content\/uploads\/2026\/06\/\u56fe\u7247-14-768x216.png 768w, https:\/\/www.inforstack.com\/wp-content\/uploads\/2026\/06\/\u56fe\u7247-14.png 1280w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u5185\u5bb9\u8981\u70b9\uff1a<\/strong><strong><\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u2022 \u7a81\u7834\u5146\u74e6\u7ea7\u529f\u8017\u95e8\u69db\uff1a<\/strong>OIST \u65b0\u4e38\u53cb\u6559\u6388\uff08Tsumoru Shintake\uff09\u56e2\u961f\u63d0\u51fa\u4e86\u4e00\u79cd\u9769\u547d\u6027\u7684\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u523b\u673a\u8bbe\u8ba1\uff0c\u53ef\u5c06\u8fd0\u884c\u529f\u8017\u4ece\u4f20\u7edf\u7cfb\u7edf\u7684\u8d85 1 \u5146\u74e6\uff08MW\uff09\u964d\u81f3 100 \u5343\u74e6\uff08kW\uff09\u4ee5\u4e0b\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u2022 \u6781\u7b80\u5149\u5b66\u8def\u5f84\u8bbe\u8ba1\uff1a<\/strong>\u8be5\u8bbe\u8ba1\u5c06\u539f\u672c\u590d\u6742\u7684\u53cd\u5c04\u955c\u7ec4\u7b80\u5316\u4e3a\u4ec5\u9700 2 \u5757\u53cd\u5c04\u955c\u7684\u6295\u5f71\u7cfb\u7edf\uff08\u6574\u4e2a\u7cfb\u7edf\u5171 4 \u5757\u53cd\u5c04\u955c\uff09\uff0c\u4f7f\u5f97\u6700\u7ec8\u5230\u8fbe\u7845\u7247\u7684 EUV \u80fd\u91cf\u6bd4\u4f8b\u4ece 1% \u5927\u5e45\u63d0\u5347\u81f3 10%\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>\u2022 \u514d\u9664\u80fd\u8017\u5e9e\u5927\u7684\u51b7\u5374\u7cfb\u7edf\uff1a<\/strong>\u529f\u8017 of \u964d\u4f4e\u4e0d\u4ec5\u4f7f\u5f97\u5149\u523b\u673a\u53ef\u4ee5\u4f7f\u7528\u66f4\u5c0f\u7684 20W \u6781\u7d2b\u5916\u5149\u6e90\uff0c\u8fd8\u5b8c\u5168\u514d\u9664\u4e86\u4f20\u7edf\u7cfb\u7edf\u5e9e\u5927\u4e14\u9ad8\u80fd\u8017\u7684\u51b7\u5374\u8bbe\u65bd\uff0c\u6709\u671b\u5927\u5e45\u964d\u4f4e\u5148\u8fdb\u82af\u7247\u7684\u5236\u9020\u4e0e\u8fd0\u884c\u6210\u672c\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u4e45\u6e5b\u6d1e\u5bdf\uff1a<\/strong><strong><\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u968f\u7740\u534a\u5bfc\u4f53\u5236\u7a0b\u8fc8\u5411 2 \u7eb3\u7c73\u53ca\u4ee5\u4e0b\uff0c\u4f20\u7edf EUV \u5149\u523b\u673a\u7684\u8d85\u9ad8\u7535\u8017\u548c\u955c\u9762\u5149\u635f\u6b63\u903c\u8fd1\u7269\u7406\u6781\u9650\u3002OIST \u5bf9\u5149\u5b66\u53cd\u5c04\u8def\u5f84\u7684\u201c\u6781\u7b80\u91cd\u65b0\u7f16\u6392\u201d\uff0c\u8bc1\u660e\u4e86\u7269\u7406\u5c42\u9762\u7684\u57fa\u7840\u67b6\u6784\u521b\u65b0\u5bf9\u7b97\u529b\u5e95\u5c42\u786c\u4ef6\u7684\u91cd\u6784\u529b\u3002\u5982\u679c\u8be5\u8bbe\u8ba1\u987a\u5229\u5546\u4e1a\u5316\uff0c\u5c06\u6781\u5927\u964d\u4f4e\u5148\u8fdb\u6676\u5706\u5382\u7684\u8d44\u672c\u5f00\u652f\u4e0e\u7eff\u8272\u73af\u4fdd\u8fbe\u6807\u538b\u529b\uff0c\u4e3a\u5168\u884c\u4e1a\u63d0\u4f9b\u66f4\u666e\u60e0\u7684\u8d85\u9ad8\u7b97\u529b\u7269\u7406\u82af\u7247\u3002<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong><em>&nbsp;&nbsp;&gt; &nbsp;\u6743\u5a01\u6e90\uff1a<\/em><\/strong><em>\u51b2\u7ef3\u79d1\u5b66\u6280\u672f\u5927\u5b66\u9662\u5927\u5b66\uff08OIST\uff09\u79d1\u7814\u6210\u679c\u52a8\u6001\u53d1\u5e03\uff082026\u5e746\u6708\u4e2d\u65ec\uff09<\/em><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong><em>\u00a0\u00a0> 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